| 摘要 |
PURPOSE: A chemical mixing apparatus is provided to mix IPA and an ultra-pure water in a mixed tank through a bubble by spraying nitrogen gas into the mixed tank to form a bubble. CONSTITUTION: Mixing tanks(50,60) store IPA and ultra-pure water. Bubble generator(52,62) is located in the lower part of the mixing tank. The bubble generator generates a bubble by spraying the nitrogen gas provided from outside inside the mixed tank. The IPA within the mixing tank and ultra-pure water are mixed with the bubble. The bubble generator is connected to the nitrogen gas supply pipeline(10) for supplying the nitrogen gas.
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