SUBSTRATE POLISHING APPARATUS AND METHOD OF POLISHING SUBSTRATE USING THE SAME

摘要

PURPOSE: A substrate polishing device and a substrate polishing method using the same are provided to improve the reliability of products by fixing and installing a polishing end point detector on the upper side of a substrate support member aside from a polishing unit. CONSTITUTION: A substrate support member(100) receives a substrate on the upper side thereof and rotates the substrate. A polishing unit(300) polishes the substrate received on the substrate support member. A polishing end point detector(400) is fixed to the upper side of the substrate support member and detects the polishing end point of the substrate received in the substrate support member.