| 摘要 |
PURPOSE: An apparatus for exhausting hume is provided to minimize the loss of a chemical solution by liquefying a chemical solution gas in an exhausting process and collecting the liquefied chemical solution into a chemical solution supplying unit. CONSTITUTION: A substrate(500) is loaded in a processing chamber(100). A chemical solution supplying unit(200) supplies a chemical solution to the processing chamber. An exhausting unit(300) is connected with the processing chamber. The exhausting unit exhausts gas generated from a reaction of the chemical solution. The exhausting unit includes a cooling tube for liquefying the gas.
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