| 摘要 |
PURPOSE: A chemical solution storage apparatus is provided to prevent the deformation and the damage of a chemical solution tank by including a supporting unit in order to support the inside of the chemical solution tank. CONSTITUTION: A chemical solution tank(110) includes an internal space for storing a chemical solution. A supporting unit supports the chemical solution tank. The supporting unit divides the internal space into a first space(110a) and a second space(110b). The supporting unit includes a first plate which is expended from the upper inner side to the lower inner side of the chemical solution tank. A cyclic unit circulates the chemical solution in the first space and the second space.
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