| 摘要 |
PURPOSE: A pressure control device is provided to reduce a pressure of a chemical tank by blocking the chemical supply of a chemical supply device when the pressure inside of the chemical tank excesses a fixed maximum pressure. CONSTITUTION: A pressure detecting part(210) is connected to a chemical tank(110) including the chemical. The pressure detecting part detects a fixed maximum pressure inside of the chemical tank. An interlock part(220) blocks a chemical supply of the chemical supplying device. A pressure controlling part(230) reduces the pressure inside of the chemical tank according to an interlock signal of the interlock part. The pressure controlling part includes a valve opening an exhaust line and the exhaust line. The exhaust line exhausts the chemical or a gas inside of the chemical tank.
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