PRIMING UNIT, CLEANING APPARATUS FOR CLEANING THE SAME

摘要

PURPOSE: A coating unit and a cleaning apparatus for cleaning the same are provided to reduce the total usage of a cleaning solution by reusing the cleaning solution. CONSTITUTION: A first roller(300) is arranged adjacently to the outlet(210) of a nozzle. A second roller(400) is arranged adjacently to the first roller. A thin plate belt(500) is rotated with the first and the second rollers. A blade removes a chemical which is remained on a thin film. A cleaning unit(800) cleans the outlet of the nozzle using the cleaning solution.