COLD SURFACE PLASMA DEVICE FOR STERILIZATION OF BACTERIA

摘要

PURPOSE: A low temperature flat board plasma system for bacteria sterilization is provided, which can generate the uniform plasma through the wide side, and is easy to control the size of the plasma. CONSTITUTION: A low temperature flat board plasma system for the bacteria sterilization includes: a gas supply part in which the inert gas is provided; a wide dielectric flat board(200) blocking up one side of the space where the provided gas is accepted; one or more surface electrodes(300) inserted into the surface of the dielectric flat board; a flashover part generating the plasma(500) in the surface of the dielectric flat board covering the surface electrode; and a voltage supply portion sanctioning the low frequency high voltage in the surface electrode.