METHOD FOR FABRICATION OF CHIP FOR DETECTION OF BIOLOGICAL MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a new method for manufacturing a microelectronics device provided with biological material detecting transistors.

SOLUTION: An improved method for manufacturing a microelectronics device provided with at least one circuit for detecting biological materials includes steps of (a) forming a plurality of transistors; depositing at least one layer with at least one insulating material (141) coating the transistors; forming one or more holes (143) in the layer of the insulating material (141) so as to expose the top surface of respective gates (135) of first-type transistors among the transistors; filling the holes with a gate material; (b) protecting gates of second-type transistors among the transistors; while removing at least part of the respective gates (135) of the first-type transistors; and the method, further includes a step of removing the gate material, prior to or at the same time as the removal conducted in step (b).

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