CRYSTALLIZATION EQUIPMENT

摘要

PURPOSE: A crystallization apparatus is provided to simultaneously arrange the first laser heads of a first gantry and the second laser heads of a second gantry in a zigzag shape and thereby perform a crystallization operation on a substrate with a larger area. CONSTITUTION: A target substrate is mounted on a stage(33). A first and a second gantry units(10, 15) are oppositely arranged on the stage. The first gantry comprises a plurality of first laser covers and first laser heads which generates laser. The first head cover fastens the first laser heads. The second gantry comprises a plurality second head cover and second laser heads. The first laser heads and the second laser heads are arranged in a zigzag shape.