| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment unit which can detect that a notch is registered in a notch registered position after alignment of a wafer to perform stable transference to an upper device, and a wafer transfer device using the alignment unit. SOLUTION: A wafer alignment unit includes: a rotating mechanism holding and rotating a wafer; and a line sensor irradiating light on the circumference of the wafer to detect the light reception amount of the irradiated light, and detects the amount of eccentricity of the wafer and a notch position formed on the circumference of the wafer from the light reception amount of the line sensor to correct the position of the wafer. The wafer alignment has a notch misregistration detecting sensor which detects misregistration of the notch after termination of the alignment. COPYRIGHT: (C)2010,JPO&INPIT |
