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发明名称
System and Method for Preventing Substrate Inspection Apparatus from Colliding with Peripheral Obstacle using Ultrasonic Sensor
摘要
申请公布号
KR100961249(B1)
申请公布日期
2010.06.03
申请号
KR20070099359
申请日期
2007.10.02
申请人
发明人
分类号
G01S3/80
主分类号
G01S3/80
代理机构
代理人
主权项
地址
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