| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for introducing a reaction substance into a vacuum chamber while the simultaneous introduction of contaminating materials or substances is suppressed to the minimum or eliminated. Ž<P>SOLUTION: Consequently, contaminating materials or substances which may be generated and interfere with the measurement or other processes can be suppressed to the minimum or eliminated. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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