| 摘要 |
PURPOSE: An aluminum nitride sintered product, a method for producing the same, and an electrostatic chuck including the same are provided, which can obtain aluminum nitride sintered body easily. CONSTITUTION: A manufacturing process of the aluminum nitride sintered product is as follows. The compound powder containing europium oxide, aluminium oxide, and titanium oxide except for samarium compound is prepared. The molding product is manufactured by using the compound powder. The molding product is plasticized by annealing at the higher temperature than firing temperature after hot press firing under vacuum or the inert atmosphere.
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