| 摘要 |
PROBLEM TO BE SOLVED: To prevent abnormal deformation of a bellows-like cover covering a linear motion shaft in a clean robot. SOLUTION: During halts of the linear motion shaft 5, a prescribed amount of air is sucked from the inside of a second arm 4 by a blower, thereby retaining the inside of the second arm 4 at a prescribed negative pressure. When the shaft 5 is moved in a direction extending (contracting) the bellows-like cover 21, the amount of suction air of the blower is decreased (increased) before a prescribed time prior to the movement, thereby raising (reducing) the pressure inside the second arm 4. When the influence of a rise (a drop) in the pressure inside the second arm 4 is exerted upon inside the cover 21, the shaft 5 is lowered (elevated). Then, the decrease (the increase) in the inner pressure of the cover 5 due to extension resulting from lowering of the shaft 5, and the rise (the drop) in the inner pressure of the cover 5 due to the rise (the drop) in the inner pressure of the second arm 4 are canceled out. COPYRIGHT: (C)2010,JPO&INPIT
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