发明名称 |
FABRICATION METHODS FOR ELECTRONIC DEVICES WITH VIA THROUGH HOLES AND THIN FILM TRANSISTOR DEVICES |
摘要 |
Fabrication methods for electronic devices with via through holes and thin film transistor devices are presented. The fabrication method the electronic device includes providing a substrate, forming a patterned lower electrode on the substrate, and forming a photosensitive insulating layer on the substrate covering the patterned lower electrode. A patterned optical shielding layer is applied on the photosensitive insulating layer. Exposure procedure is performed curing the exposed photosensitive insulating layer. The optical shielding layer and the underlying photosensitive insulating layer are sequentially removed, thereby forming an opening. A patterned upper electrode is formed on the photosensitive insulating layer filling the opening to create a conductive via hole.
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申请公布号 |
US2010129966(A1) |
申请公布日期 |
2010.05.27 |
申请号 |
US20090388480 |
申请日期 |
2009.02.18 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
CHEN WEN-CHUN;LIN KUO-TUNG;LEE YUH-ZHENG;SUNG CHAO-FENG |
分类号 |
H01L21/336;H01K3/10;H01L21/768 |
主分类号 |
H01L21/336 |
代理机构 |
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主权项 |
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地址 |
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