发明名称 WAVELENGTH CONVERSION LIGHT SOURCE APPARATUS AND WAVELENGTH CONVERSION METHOD
摘要 A wavelength conversion light source apparatus includes a fundamental wave light source configured to emit a fundamental wave, a nonlinear crystal configured to convert a wavelength of the fundamental wave by being irradiated with the fundamental wave and making the fundamental wave pass therethrough, and a movement unit configured to place the nonlinear crystal thereon and continuously move the nonlinear crystal within a plane, where a phase matching condition is not violated, so that a passage path of the fundamental wave passing through the nonlinear crystal is changed.
申请公布号 US2010128343(A1) 申请公布日期 2010.05.27
申请号 US20090611456 申请日期 2009.11.03
申请人 ADVANCED MASK INSPECTION TECHNOLOGY, INC.;MEGAOPTO CO., LTD. 发明人 IMAI SHINICHI;URATA YOSHIHARU
分类号 G02F1/35 主分类号 G02F1/35
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