发明名称 |
WAVELENGTH CONVERSION LIGHT SOURCE APPARATUS AND WAVELENGTH CONVERSION METHOD |
摘要 |
A wavelength conversion light source apparatus includes a fundamental wave light source configured to emit a fundamental wave, a nonlinear crystal configured to convert a wavelength of the fundamental wave by being irradiated with the fundamental wave and making the fundamental wave pass therethrough, and a movement unit configured to place the nonlinear crystal thereon and continuously move the nonlinear crystal within a plane, where a phase matching condition is not violated, so that a passage path of the fundamental wave passing through the nonlinear crystal is changed.
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申请公布号 |
US2010128343(A1) |
申请公布日期 |
2010.05.27 |
申请号 |
US20090611456 |
申请日期 |
2009.11.03 |
申请人 |
ADVANCED MASK INSPECTION TECHNOLOGY, INC.;MEGAOPTO CO., LTD. |
发明人 |
IMAI SHINICHI;URATA YOSHIHARU |
分类号 |
G02F1/35 |
主分类号 |
G02F1/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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