| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem of transcription of a groove of a polishing pad to be used, or deterioration in flatness that remains in a conventional groove suede polishing pad, and a problem of the fact that the verification of the best groove shape has not been completed, the problem having not been solved only by an improvement of a polishing machine or a polishing method. <P>SOLUTION: This groove suede polishing pad attached to the polishing machine to be used for polishing, has a plurality of grooves formed in a V-shaped in cross section with width ranging from 0.1 to 0.8 mm and depth ranging from 0.2 to 0.7 mm. It is designed to avoid a bad influence on an article to be polished. <P>COPYRIGHT: (C)2010,JPO&INPIT |
