| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element displacement amount of which is large and in which deterioration of a piezoelectric layer is inhibited. <P>SOLUTION: The piezoelectric element 100 includes a substrate 10, a lower electrode 20 formed above the substrate 10, the piezoelectric layer 30 formed above the lower electrode 20, an upper electrode 40 formed above the piezoelectric layer 30, a protection layer 60 formed on the lateral sides of the piezoelectric layer 30, and a self-organized monomolecular film 70 formed on the side of each of the protection layer 60 not facing the piezoelectric layer 30. <P>COPYRIGHT: (C)2010,JPO&INPIT |
