NETWORK SYSTEM FOR CONTROLLING VARIOUS SEMICONDUCTOR MANUFACTURING EQUIPMENTS AND METHOD OF THE SAME

摘要

PURPOSE: A network system for controlling various semiconductor manufacturing equipments and a method of the same are provided to interface a host regardless of the kind of the semiconductor manufacturing facilities by making an external interface and an internal interface dual. CONSTITUTION: A network system(100) comprises a plurality of semiconductor manufacturing facilities(110-130), a network(104), and a host(102). The host is connected to a plurality of semiconductor manufacturing facilities through the network. The host controls semiconductor manufacturing facilities. The semiconductor manufacturing facilities make the internal interface and the external Interface dual.