发明名称 APPARATUS AND METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an apparatus and a method for manufacturing a piezoelectric vibration device, which can perform manufacturing processing on a correct portion to be processed of a workpiece independently of a change in a workpiece size and a set state of a workpiece holding part. SOLUTION: The apparatus for manufacturing the piezoelectric vibration device includes: the workpiece holding part 4 on which a workpiece 3 is mounted; a manufacturing process part 1 comprising a plurality of manufacturing process means 1a, 1b, 1c, ... for performing manufacturing processes; and a control part 2 for outputting a control signal including instruction data for instructing the manufacturing processes for the workpiece 3 and positional data indicating a portion to be processed of the workpiece 3 to the manufacturing process part 1. At least one manufacturing process means (manufacturing process means 1b) among the plurality of manufacturing process means 1a, 1b, 1c, ... includes: an imaging part 1b1 for imaging the workpiece 3 mounted on the workpiece holding part 4; and an image data processing part 1b2 for executing data processing for image data obtained by the imaging part 1b1. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010118747(A) 申请公布日期 2010.05.27
申请号 JP20080288840 申请日期 2008.11.11
申请人 DAISHINKU CORP 发明人 MAEDA MASAFUMI;TOKUDA SHUNICHI
分类号 H03H3/02;H01L23/02;H03H9/10 主分类号 H03H3/02
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