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经营范围
发明名称
Negativ-arbeitende Resists
摘要
申请公布号
DE60141783(D1)
申请公布日期
2010.05.27
申请号
DE2001641783
申请日期
2001.01.17
申请人
FUJIFILM CORP.
发明人
UENISHI, KAZUYA;ADEGAWA, YUTAKA;SHIRAKAWA, KOJI
分类号
G03F7/004;C08F12/22;C08K5/00;C08L25/18;G03F7/038;H01L21/027
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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