A TACTILE SENSOR ARRAY AND ITS MANUFACTURING METHOD

摘要

PURPOSE: A tactile sensor array and a manufacturing method thereof are provided to enhance the reliability and the durability of the product by attaching an elastic body to a sensor or using an elastic substrate. CONSTITUTION: A polymer layer(12) is formed at a base. Metal layers(14,16) for forming a strain gauge and a signal line is deposited at the top of the polymer layer. A signal line is formed by forming and patterning a photosensitive film on the metal layer. The strain gage of the signal line is formed. Only the signal line is metal-plated by the patterning of the photosensitive film in order to reduce the contact resistance of the signal line. The cavity layer with a cavity formed at the location corresponding to the strain gage is connected to the polymer layer. A protective layer is formed at the strain gage and the signal line.