发明名称 |
APPARATUS FOR SENSING AN ERROR OF A NEEDLE POSITION AND DISPENSING HEAD FOR SEMICONDUCTOR POTTING SYSTEM |
摘要 |
PURPOSE: An apparatus for sensing a needle position error for a dispenser head and a coating head for a semiconductor potting device including the same are provided to prevent the defect of a substrate or chip by simply detecting a needle position error for a dispenser head with two brackets. CONSTITUTION: A first bracket(110) comprises a first sensor. The first sensor has a separation space and surrounds at least part of an outer side of the needle. A second bracket(120) includes a second sensor. The second sensor has the separation space and surrounds the outer side of the needle in an opposite direction to the first sensor. A space controller(150) horizontally move the second bracket and controls a separation distance between the needle and the second sensor. A contact detector detects whether the outer side of the needle is contacted with the first sensor and the second sensor.
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申请公布号 |
KR20100055701(A) |
申请公布日期 |
2010.05.27 |
申请号 |
KR20080114548 |
申请日期 |
2008.11.18 |
申请人 |
TOP ENGINEERING CO., LTD. |
发明人 |
KIM, YUN GI |
分类号 |
H01L21/58 |
主分类号 |
H01L21/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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