发明名称 APPARATUS FOR SENSING AN ERROR OF A NEEDLE POSITION AND DISPENSING HEAD FOR SEMICONDUCTOR POTTING SYSTEM
摘要 PURPOSE: An apparatus for sensing a needle position error for a dispenser head and a coating head for a semiconductor potting device including the same are provided to prevent the defect of a substrate or chip by simply detecting a needle position error for a dispenser head with two brackets. CONSTITUTION: A first bracket(110) comprises a first sensor. The first sensor has a separation space and surrounds at least part of an outer side of the needle. A second bracket(120) includes a second sensor. The second sensor has the separation space and surrounds the outer side of the needle in an opposite direction to the first sensor. A space controller(150) horizontally move the second bracket and controls a separation distance between the needle and the second sensor. A contact detector detects whether the outer side of the needle is contacted with the first sensor and the second sensor.
申请公布号 KR20100055701(A) 申请公布日期 2010.05.27
申请号 KR20080114548 申请日期 2008.11.18
申请人 TOP ENGINEERING CO., LTD. 发明人 KIM, YUN GI
分类号 H01L21/58 主分类号 H01L21/58
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