PREPARATION METHOD OF LA-SR-MN OXIDE THIN FILM

摘要

PURPOSE: A manufacturing method of lanthanum-strontium-manganese oxide thin film is provided, which can control a crystal phase structure in perovskite structure from an amorphous substance. CONSTITUTION: A manufacturing method of lanthanum-strontium-manganese oxide thin film comprises: a step of manufacturing precursor solution by dissolving lanthanum precursor, strontium precursor, and manganese precursor aqueous mixed solvent; a step of injecting precursor solution into a nozzle; a step of forming a water drop by spraying precursor solution under the electric field mood; and a step of drying water drop by adsorbing water drop to the preheated substrate.