PROBE AND MENUFACTURING METHOD OF THE SAME

摘要

PURPOSE: A probe and a manufacturing method of the same are provided to facilitate elastic deformation in coating a target by forming the both side of the tip as a pyramid. CONSTITUTION: A tip part(110) touches with a pad. The pad is formed in a target. A first beam part(120) is formed in vertical direction to a central line of a tip part. A second beam part(130) is formed by the first beam part. A first connector(160) and a second connector(170) connect the one side to the other side of the first beam part. A main post(140) is formed from the second connection part in upward. A base(150) is electrically connected to the substrate.