| 摘要 |
The method comprises irradiating a polymer matrix (1) with laser radiation (9), focusing the laser radiation at a focal point (11) and adjusting the focal point in such a way that the focal point lies behind the surface of the polymer matrix turned to the radiation and a material removal is caused on the polymer matrix. A reaction area (13) is produced within the polymer matrix. Educt exists after the material removal in the reaction area and reacts in the reaction area under irradiation of the reaction area with laser radiation to a product. The method comprises irradiating a polymer matrix (1) with laser radiation (9), focusing the laser radiation at a focal point (11) and adjusting the focal point in such a way that the focal point lies behind the surface of the polymer matrix turned to the radiation and a material removal is caused on the polymer matrix. A reaction area (13) is produced within the polymer matrix. Educt exists after the material removal in the reaction area and reacts in the reaction area under irradiation of the reaction area with laser radiation to a product. The reaction area is limited spatially through the polymer matrix as also through a glass substrate (7) in contact with the polymer matrix and transparent for the radiation wavelength. The radiation passes to the glass substrate before it reaches on the polymer matrix. The product separates under irradiation of the reaction area with the laser beam from the glass substrate. The reaction area is produced so that the reaction area has a spatial expansion with a diameter of 70 mu m and a depth of 40 mu m. The reaction area is produced by a first pulse of a pulsed laser radiation and irradiated with a second pulse of pulsed laser radiation. The reaction areas arranged to each other within the polymer matrix are produced by irradiation of the polymer matrix with laser radiation. The radiation is a pulsed laser radiation and is laterally guided during irradiation of the pulsed laser radiation relative to the polymer matrix or the polymer matrix relative to the pulsed laser radiation. The reaction areas are produced in such a way that the reaction areas overlap itself with 25% of its spatial expansion. The radiation is produced with pulsed laser and a pulse rate of 10-300 kHz. The focal point lies in the reaction area in the polymer matrix and is adjusted in such a way that the radiation power density of the surface of the polymer matrix is 3 J/cm 2>. The focal point or the maximum radiation power density within the reaction area is 10 J/cm 2>. |
