| 摘要 |
PURPOSE: A nozzle spraying chemical and a substrate process apparatus including the same are provided to improve the efficiency of an apparatus for processing the substrate with the liquid medicine by improving injection power of the liquid medicine on the substrate. CONSTITUTION: In a nozzle spraying chemical and a substrate process apparatus including the same, a liquid medicine flows into a liquid medicine inlet port(122). A guide unit allows the liquid medicine to flow in spiral inside nozzle where the flowed liquid medicine is flowed. A liquid medicine injection unit injects the liquid medicine which flow in spiral.
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