CHEMICAL VAPOR DEPOSITION APPARATUS,申请号KR20070123471-传众专利搜索

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发明名称	CHEMICAL VAPOR DEPOSITION APPARATUS
摘要
申请公布号	KR100959725(B1)	申请公布日期	2010.05.25
申请号	KR20070123471	申请日期	2007.11.30
申请人		发明人
分类号	C23C16/00;H01L21/20	主分类号	C23C16/00
代理机构		代理人
主权项
地址

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