| 摘要 |
PURPOSE: A liquid supply unit for processing a substrate is provided to improve the convenience and work efficiency by automatically restoring a pump after temporary stop of the pump due to a transient over-current. CONSTITUTION: In a liquid supply unit for processing a substrate, a chamber processes a substrate transferred to inside the chamber. A supply line connects a liquid medicine storing the liquid medicine to a chamber. A pump(30) is installed in the supply line supplies a liquid medicine. A drain line connects a lower part of the chamber to the liquid medicine to restore the liquid medicine used in the chamber to the liquid medicine. An automatic restoration apparatus(50) is restored when an excessive current is supplied to the pump.
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