| 摘要 |
PROBLEM TO BE SOLVED: To securely discharge sludge choked in a suction pad. SOLUTION: A suction pad cleaning device which cleans the suction pad (51a) supported by a support member (53a) and sucking a workpiece (20) includes a cleaning liquid supply means (58) of supplying a cleaning liquid from the inside of the suction pad toward a suction surface (52a) of the suction pad, and an inner area coating portion (30) for coating an inner area of the suction pad on the suction surface of the suction pad from an outer area around the inner area. Further, the chuck table (12a) includes the suction pad for sucking the workpiece, support members (53a, 57) for supporting the suction pad, an outer area passage (71) formed on the support members and extending to the outer area around the inner area of the suction pad, and the cleaning liquid supply means of passing the cleaning liquid through the outer area passage to supply it toward the suction surface of the suction pad. COPYRIGHT: (C)2010,JPO&INPIT |
