| 摘要 |
A technology for organic material vapor deposition that would realize enhancing of the efficiency of evaporation material use, prevention of any aging deterioration of evaporation material and assured prevention of any mask deformation by heat at vapor deposition. There is disclosed an organic material evaporation source comprising a shower-plate-shaped emission section (11) provided in its surface with an arrangement of multiple emission orifices (12); disposed within the emission section (11), a supply tube (14) for emitting the vapor of introduced organic evaporation material through a blowout orifice (15) toward the bottom part (11a) of the emission section (11) to thereby attain supply into the emission section (11); and cooling means (17) disposed at at least a region on the emission orifices (12) side of the emission section (11). The cooling means (17) is provided so as, for example, to cover the whole of the emission section (11) and has vapor passage holes (17a) for passage of the vapor of the organic evaporation material provided at the regions thereof corresponding to the emission orifices (12) of the emission section (11).
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