| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro movable element suitable for suppressing displacement in a non-operating direction and obtaining a high resonance frequency, in a movable part which is rotated and displaced during driving, and also to provide a micro movable element array, and an optical switching device having such a micro movable element. SOLUTION: The micro movable element X1 is provided with: a frame 20; the movable part 10; and a pair of connecting parts 30 for connecting them to prescribe an axis A1 of a rotating and displacement operation of the movable part 10. The connecting parts 30 include connecting bars 31 and 32 extending so as to increase a separation distance from the frame 20 side to the movable part 10 side. The connecting bar 31 is connected to a first side relative to the axis A1 in the movable part 10. The connecting bar 32 is connected to a second side relative to the axis A1 in the movable part 10. A position C1 where the connecting bar 31 is connected to the movable part is nearer to the axis A1 than the position C2 where the connecting bar 32 is connected to the movable part in a separated direction of the connecting bars 31 and 32. COPYRIGHT: (C)2010,JPO&INPIT |
