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发明名称
Einzelwaferätzgerät
摘要
申请公布号
DE602008000923(D1)
申请公布日期
2010.05.20
申请号
DE200860000923T
申请日期
2008.02.01
申请人
SUMCO CORP.
发明人
KATOH, TAKEO;HASHII, TOMOHIRO;MURAYAMA, KATSUHIKO;KOYATA, SAKAE;TAKAISHI, KAZUSHIGE
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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