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发明名称
PRODUCTION METHOD FOR BONDING WAFER AND BONDING WAFER PRODUCED BY THIS METHOD
摘要
申请公布号
EP1189285(A4)
申请公布日期
2008.04.02
申请号
EP20010914187
申请日期
2001.03.21
申请人
SHIN-ETSU HANDOTAI COMPANY LIMITED
发明人
ABE, TAKAO;OHNUKI, SOUMEI;SUZUKI, SHYUICHI;YOKOKAWA, ISAO
分类号
C30B29/06;C23C14/48;C30B33/06;H01L21/02;H01L21/265;H01L21/762;H01L27/12;(IPC1-7):H01L27/12
主分类号
C30B29/06
代理机构
代理人
主权项
地址
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