发明名称 IGNITION APPARATUS FOR ARC SOURCES
摘要 The present invention relates to an ignition device for igniting a high-current discharge of an electrical arc evaporator in a vacuum coating system. Ignition is performed by means of mechanically closing and opening a contact between the cathode and anode. Contact is established by means of an ignition finger which can move on a forced path. On account of the forced path, the ignition finger can be moved to a park position, which is protected against coating, by means of a simple mechanical drive and said ignition finger can also be used to ignite a second target.
申请公布号 CA2742870(A1) 申请公布日期 2010.05.20
申请号 CA20092742870 申请日期 2009.10.08
申请人 OERLIKON TRADING AG, TRUEBBACH 发明人 KRASSNITZER, SIEGFRIED;GSTOEHL, OLIVER;HAGMANN, JUERG
分类号 H01J37/32 主分类号 H01J37/32
代理机构 代理人
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