| 摘要 |
PROBLEM TO BE SOLVED: To provide a unit hardly causing a contact failure on a contact surface regardless of repetitive temperature rising and lowering, long in service life and allowing uniform heating with no reduction of the original temperature distribution of a heater. SOLUTION: The unit includes a heating element 2 with a conduction path formed on a main surface of a support base material 1, a bar electrode 4 connected with terminals of the conduction path and a power source part at end terminals, a coil spring 5 which is a spring part pressing the bar electrode 4 into close contact with the heating element 2 and an electrode support part 6 supporting the bar electrode 4. The coil spring 5 is supported by bushing 9 and the coil spring 5 is compressed by the actions of the bushing 9, a fixing bolt 7 and a nut 8 to bring a terminal provided on one end of the bar electrode 4 into close contact with the terminal of the conduction path of the heating element 2. The electrode support part 6 disposed on a surface opposed to a heating sample supporting surface of the support base material 1 has an effect to suppress heat radiation from the heating element 2 by thermal insulation or heat radiation toward the heating element. COPYRIGHT: (C)2010,JPO&INPIT |
