发明名称 METHOD FOR DETACHING AND REMOVING A SEMICONDUCTOR CHIP FROM A TAPE
摘要 The invention relates to a method for detaching and removing a semiconductor chip (1) from a tape (3) in three phases. In the first phase, the semiconductor chip (1) is partially detached from the tape (3) using mechanical means, but without the participation of a chip gripper (11). In the second phase, the semiconductor chip (1) is completely detached from the tape (3), wherein the semiconductor chip (1) is held by the chip gripper (11). In the third phase, the chip gripper (11) is raised and moved away.
申请公布号 WO2010054957(A1) 申请公布日期 2010.05.20
申请号 WO2009EP64535 申请日期 2009.11.03
申请人 ESEC AG;BEHLER, STEFAN 发明人 BEHLER, STEFAN
分类号 H01L21/68;H01L21/00 主分类号 H01L21/68
代理机构 代理人
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