| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem that since template holders occupy a significant amount of space in an imprint lithography apparatus, there is not sufficient space to provide an imprint template to imprint every imprint area at the same time. <P>SOLUTION: The imprint lithography apparatus has a first array of template holders, a second array of template holders, and a substrate table arranged to support a substrate to be imprinted, wherein the first array of template holders is arranged to hold an array of imprint templates that can be used to imprint a first array of patterns onto the substrate, and the second array of template holders is arranged to hold an array of imprint templates that can be used to imprint a second array of patterns onto the substrate, the patterns imprinted by the second array being interspersed between the patterns imprinted by the first array. <P>COPYRIGHT: (C)2010,JPO&INPIT |
