| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide polysilazane excellent in filling power of grooves while having high molecular weight, to provide a synthetic method thereof, to provide a polysilazane-containing composition for semiconductor element production, and to provide a production method of semiconductor elements and using the composition for semiconductor element production. Ž<P>SOLUTION: The polysilazane can be synthesized by reacting dichlorosilane, trichlorosilane and ammonia added in a reaction solvent as reactants in the presence of a catalyst, has 2,000-30,000 weight average molecular weight in terms of polystyrene, and is represented by chemical formula (1). Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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