| 摘要 |
<P>PROBLEM TO BE SOLVED: To effectively and largely tilt a micromirror independently of device characteristics. Ž<P>SOLUTION: In a micromirror device 10, movable electrodes 20A, 20B are extended in an X-direction from the micromirror 12, while fixed electrodes 30A, 30B, 30C are extended from supporting frame 16 to the micromirror 12 and arranged alternatively lined up with the movable electrodes 20A, 20B. A plurality of movable electrode protrusions 22A<SB>1</SB>to 22A<SB>5</SB>and fixed electrode protrusions 32A<SB>1</SB>to 32A<SB>5</SB>having the same width are formed along an X-axis on the movable electrodes 20A, 20B and the fixed electrodes 30A to 30C, the pitch of the fixed electrode protrusions 32A<SB>1</SB>to 32A<SB>5</SB>is kept constant while the pitch of the movable electrode protrusions 22A<SB>1</SB>to 22A<SB>5</SB>is made larger as separated from the micromirror 12. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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