PRESSURE REDUCING EXHAUST VALVE, AND PRESSURE REDUCING DEVICE USING PRESSURE REDUCING EXHAUST MECHANISM INCLUDING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a pressure reducing exhaust valve which is applicable to a pressure reducing device having only one exhaust passage (main exhaust passage) and can suppress soaring of particles with high exhausting speed, and also to provide a pressure reducing device using a pressure reducing exhaust mechanism including the same. SOLUTION: The pressure reducing exhaust valve 10 to be mounted in an exhaust passage 5 having one end communicated with a vacuum chamber and the other end communicated with a vacuum pump 4 includes: a pipe part 11 connected to the exhaust passage 5; an on-off valve 20 provided within the pipe part 11 to be movable forward and backward to open and close the exhaust passage 5; and a porous body part 22 with vent pores, provided in the on-off valve 20. A state where the vacuum chamber 2 communicates with the vacuum pump 4 through the porous body part 22 is provided between the open state and close state of the exhaust passage 5 by the forward and backward movement of the on-off valve 20. COPYRIGHT: (C)2010,JPO&INPIT