| 摘要 |
PURPOSE: An evaporator capable of top-down deposition is provided to minimize the emission of heat by attaching a multi-layered thermal insulation plate to the interior of the housing. CONSTITUTION: An evaporator capable of top-down deposition comprises a cylinder, a plurality of outlets(12) passing through the cylinder, a reflective groove with screw thread of certain depth, a crucible(10) with a cover thinner than the depth of the reflective groove, a heating unit(19), a thermal insulation plate(21), and an outer cover composed of a side cover and a top cover.
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