| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluid assisted gas gauge proximity sensor capable of outputting an appropriate frequency response in a useful low pressure and a useful sensitivity and facilitating a remote sensing of chamber pressure. <P>SOLUTION: The fluid assisted gas gauge, coupled to a pressure sensor, can perform proximity measurement within a wide bandwidth. A two-chamber gas gauge, containing a gas-filled measurement chamber and a fluid-filled transfer chamber and a diaphragm separating the two chambers, exhausts gas onto a measured surface, while an incompressible fluid transmits the pressure to a pressure sensor. Response time is shortened by minimizing the gas volume of the gas gauge. In addition, the incompressible fluid permits the pressure sensor to be remotely located from the measurement point without sacrificing the response time performance. A differential bridge version of the fluid assisted gas gauge reduces the influence of common mode. <P>COPYRIGHT: (C)2010,JPO&INPIT |
