| 摘要 |
<p>Substrates are transferred and received to and from a processing chamber having various substrate placing positions. When first to fourth driving shafts are rotated in a state where an A-type rotating member (13) and a B-type rotating member (14) are stopped, first to fourth placing sections (15-15) linearly move on a line extending from one side thereof. When each of the pairs of the first driving shaft and the A-type rotating member (13), the second driving shaft and the B-type rotating member (14), the third driving shaft and the A-type rotatingmember (13), and the fourth driving shaft and the B-type rotating member (14) rotate same angle in the same direction, the first to the fourth placing sections (15-15) are rotated and moved. When the linear movement and the rotating movement are combined, the first to the fourth placing sections (15-15) can be moved to desired positions.</p> |
