发明名称 Parts manipulation, inspection, and replacement system and method
摘要 Improved method and apparatus for machine vision. One embodiment provides automated imaging and analysis, optionally including Scheimpflug's condition on the pattern projector, telecentric imaging and projecting, an IR filter, a mask to constrain observed illumination, and/or a sine-wave projection pattern for more accurate results. Another embodiment provides circuitry for a machine-vision system. Another embodiment provides a machine-vision system, optionally including accommodation of random orientation of parts in trays, irregular location of features being inspected, crossed pattern projectors and detectors for shadow reduction, detection of substrate warpage as well as ball-top coplanarity, two discrete shutters (or flash brightnesses) interleaved (long shutter for dark features, short shutter for bright features). Another embodiment provides parts inspection, optionally including a tray elevator that lifts trays to an inspection surface, moves trays in short tray dimension, provides first tray inspection at a major surface of the elevator, and/or provides a tray flipper.
申请公布号 US7719670(B2) 申请公布日期 2010.05.18
申请号 US20080169610 申请日期 2008.07.08
申请人 HACKNEY JOSHUA J;MALEK ARYE;ULRICH FRANZ W;ESTRIDGE JOHN B 发明人 HACKNEY JOSHUA J.;MALEK ARYE;ULRICH FRANZ W.;ESTRIDGE JOHN B.
分类号 G01N21/00;G01B11/25;G01N21/956;G03F7/20;H01L21/00 主分类号 G01N21/00
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