发明名称 |
Process of making a tuning fork type crystal component |
摘要 |
A manufacturing method produces an angular velocity sensor element easily with a high degree of accuracy. The manufacturing method includes forming a number of tuning fork shaped crystal elements on a single crystal wafer by a photo-etching technique, the crystal elements having protrusion ridge line sections in the lengthwise direction of +X faces of the crystal, caused by etching anisotropy. A step is included for forming a metallic film on each side face including both principal planes and said +X face of said tuning fork shaped crystal element of the single crystal wafer. The method also includes dividing the metallic film of the +X face along the protrusion ridge line section and forming first and second sensor electrodes.
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申请公布号 |
US7716807(B2) |
申请公布日期 |
2010.05.18 |
申请号 |
US20060481290 |
申请日期 |
2006.07.05 |
申请人 |
NIHON DEMPA KOGYO CO., LTD. |
发明人 |
MATSUDO HIDERYO;YOTUYA SHIGETO;KATASE JUN;OHTSUKA TAKAHIRO |
分类号 |
G01P9/04;H04R31/00;G01C19/56;H01L41/08;H01L41/18;H01L41/22;H03H3/02;H03H9/21 |
主分类号 |
G01P9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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