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发明名称
Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
摘要
申请公布号
USD615936(S1)
申请公布日期
2010.05.18
申请号
US20090342847F
申请日期
2009.09.02
申请人
TOKYO ELECTRON LIMITED
发明人
SATO IZUMI
分类号
主分类号
代理机构
代理人
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