| 摘要 |
PROBLEM TO BE SOLVED: To eliminate an unnecessary energy-calibration operation, while avoiding an operation of a measurement with poor reliability under a significant energy position gap, by securely informing an analyst that an energy calibration is necessary. SOLUTION: On an X-ray spectrum generated based on a detected signal obtained by irradiating with a primary X-ray a sample 2 to be measured, a Rayleigh scattering ray detection section 14 detects a Rayleigh scattering ray which is expected to appear on an energy position in accordance with a target element of an X-ray tube 1. An energy determination section 15 determines absence of an energy position gap when detecting the scattering ray, and determines that an energy position gap is significant enough for energy calibration to be needed when detecting no scattering ray. In that case, a control section 20 interrupts measurement, and an alarming section 22 displays that energy calibration is needed. With that, an analyst can perform energy calibration at a precise timing. COPYRIGHT: (C)2010,JPO&INPIT
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