QUARTZ GLASS CRUCIBLE HAVING MULTILAYERED STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a quartz silica glass crucible which enables the production (pulling) of silicon single crystals with uniform quality even in the production (pulling) of large sized silicon single crystals, while suppressing local temperature fluctuation of molten silicon.

SOLUTION: The quartz silica glass crucible is employed in pulling silicon single crystals and includes at least a transparent layer, semitransparent layer, and opaque layer disposed from the inner surface side to the outer surface side of the crucible. The content of bubbles in the transparent layer is less than 0.3%; the content of bubbles in the semitransparent layer falls within a range of 0.3-0.6%; and the content of bubbles in the opaque layer is greater than 0.6%.

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