| 摘要 |
PROBLEM TO BE SOLVED: To obtain an actuator that increases the force, generated between a magnet body and a coil, by increasing the number of turns of a conducting wire wound around the coil, suppresses a temperature rise of the coil, and also, suppresses the occurrence of an error in the displacement amount, detected by a capacitive sensor, of a drive target body. SOLUTION: The actuator includes: a magnet body 2; a first shaft 4 fitted to the magnet body 2 and whose one end is mounted to a mirror 1; a second shaft 5 provided oppositely to the first shaft 4; a first sensor electrode 13 mounted to the first shaft 4; a second sensor electrode 14 mounted to the second shaft 5; a cylindrical coil 3 arranged to the axial outside of the magnet body 2; a coil holding means 6 holding the coil 3; a heat discharging means 10 for discharging heat of the coil holding means 6 to the outside; and a base 8 supporting the coil holding means 6 via a spacer 7 while supporting the second shaft 5. COPYRIGHT: (C)2010,JPO&INPIT |
